Atomic layer deposition of titanium, zirconium and hafnium dioxides: growth mechanisms and properties of thin films ; 49 (Dissertationes physicae Universitatis Tartuensis)
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Atomic layer deposition of titanium, zirconium and hafnium dioxides: growth mechanisms and properties of thin films ; 49 (Dissertationes physicae Universitatis Tartuensis)

Technical data

Publisher:
Tartu Ülikool
Published:
Language:
English
Depositor:
Tartu Ülikool
Type:
book
Copyrighted
ESTER
b22327873
ISBN
978-9949-11-543-3

URL: http://www.digar.ee/id/nlib-digar:1995

Keywords

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